6-DOF HEXAPOD Handling Robot from Physik Instrumente

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6-DOF HEXAPOD Handling Robot

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Description

The M-840 HEXALIGHT robot is based on PI's experience in high-resolution parallel kinematic machines (PKM) over more than a decade. PI Hexapods were originally used in astronomical telescopes for mirror and antenna adjustments over wide ranges in small step sizes. The M-840 provides six degrees of freedom with 3 µm minimum incremental motion (combined 6-axis move, design-resolution of individual struts is 0.016 µm for the M-850.5DG) and allows the user to define the center of rotation (pivot point) anywhere inside or outside the system. The M-840 Hexapod is of great value for any complex, high-accuracy positioning and alignment task where independent motion in six degrees of freedom is required.

Fast Positioning in Space
Compared to the M-850 Hexapods, the M-840 is built for higher speeds with lower loads. Up to 10 kg in any orientation can be moved at with up to 50 mm/sec (600 mrad/sec) true path control. The control system automatically manages its path planning and the coordination of the six motors and minimizes runout and unwanted motion.

6-DOF Parallel Machines
The M-840 Hexapod consists of six struts which expand and contract between a bottom and a top platform. All motion in space of the top platform is achieved by changing the length of the individual struts with sub-micron resolution.

In contrast to conventional multi-axis positioning systems, where single-axis positioners are stacked upon each other, parallel kinematics systems such as the Hexapod do not exhibit error-summation. Single stage inaccuracies, moving cables of the upper stages, cosine errors due to stack height of the single positioners are all eliminated, and a repeatability in space of a few microns can be achieved. Another big advantage is that with PI Hexapods the center of rotation (pivot point) stays where programmed during all motion.

  • Six Degrees of Freedom
  • Fast Step-and-Settle
  • No Moving Cables for Improved Reliability, Ease of Setup and Reduced Friction
  • Load Capacity 10 kg
  • Repeatability to 2 µm (Six-Axis Moves)
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Better Dynamics & Throughput
  • True Path Control
  • PivotAnywhere™ Virtualized Center of Rotation Set by Software
  • User-Friendly Software and Control Electronics